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http://dx.doi.org/10.6111/JKCGCT.2017.27.3.105

A study on the crystallinity of AlN single crystals by heat treatment  

Kang, Seung-Min (International Graduate School of Design Convergence, Hanseo University)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.27, no.3, 2017 , pp. 105-109 More about this Journal
Abstract
AlN single crystal was thermally treated at $1200^{\circ}C$ and $1500^{\circ}C$ in the ambient gas of nitrogen. AlN single crystal was obtained by sublimation growth process using by a facility having a growth part which was heated by RF (Radio Frequency) induction heating. In this report, the optical microscopic results taken from thermally treated AlN single crystal and FWHM (Full width of half maximum) measured by DCXRD (Double crystal X-ray Diffractometry) were reported.
Keywords
AlN; Single crystals; Heat treatment; FWHM; Sublimation growth process;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
연도 인용수 순위
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