Crystal structure investigation of AlN crystal grown on 6H-SiC seed by a physical vapor transport method |
Shin, Hee-Won
(Department of Advanced Materials Engineering, Dong-Eui University)
Lee, Dong-Hoon (Department of Advanced Materials Engineering, Dong-Eui University) Kim, Hwang-Ju (Department of Advanced Materials Engineering, Dong-Eui University) Park, Mi-Seon (Department of Advanced Materials Engineering, Dong-Eui University) Jang, Yeon-Suk (Department of Advanced Materials Engineering, Dong-Eui University) Lee, Won-Jae (Department of Advanced Materials Engineering, Dong-Eui University) Kim, Jung-Gon (Daegu Gyeongbuk Institute of Science & Technology) Jeong, Seong-Min (Korea Institute of Ceramic Engineering and Technology) Lee, Myung-Hyun (Korea Institute of Ceramic Engineering and Technology) Seo, Won-Seon (Korea Institute of Ceramic Engineering and Technology) |
1 | M. Miyanaga, N. Mizuhara, S. Fujiwara, M. Shimazu, H. Nakahata and T. Kawase, "Evaluation of AlN singlecrystal grown by sublimation method", J. Cryst. Growth 300 (2007) 45. DOI |
2 | Y. Taniyasu and M. Kasu, "Improved emission efficiency of 210 nm deep-ultraviolet aluminum nitride light-emitting diode", NTT Tech. Rev 8 (2010) 1. |
3 | G.A. Slack and T.F. McNelly, "Growth of high purity AlN crystals", J. Cryst. Growth 34 (1976) 263. DOI |
4 | G.A. Slak and T.F. McNelly, "AlN single crystals", J. Cryst. Growth 42 (1977) 560. DOI |
5 | M. Bickermann, B.M. Epelbaum and A. Winnacker, "Characterization of bulk AlN with low oxygen content", J. Cryst. Growth 269 (2004) 432. DOI |
6 | L. Liu and J.H. Edgar, "Substrates for gallium nitride epitaxy", Mater. Sci. Eng. 37 (2002) 61. DOI |
7 | R. Dalmau, R. Schlesser, B.J. Rodriguez, R.J. Nemanich and Z. Sitar, "AlN bulk crystals grown on SiC seeds", J. Cryst. Growth 281 (2005) 68. DOI |
8 | C. Hartmann, A. Dittmar, J. Wollweber and M. Bickermann, "Bulk AlN growth by physical vapor transport", Semicond. Sci. Technol. 29 (2014) 084002. DOI |
9 | S.M. Kang, "A study on the crystalline phases of AlN single crystals grown by PVT method", J. Korean Cryst. Growth Cryst. Technol. 24 (2014) 54. DOI |
10 | C. Hartmann, M. Albrecht, J. Wollweber, J. Schuppang, U. Juda and C. Guguschev, "SiC seed polarity-dependent bulk AlN growth under the influence of residual oxygen", J. Cryst. Growth 344 (2012) 19. DOI |