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http://dx.doi.org/10.6111/JKCGCT.2014.24.3.127

Microstructure and plasma resistance of Y2O3-BN composites  

Lee, Hyun-Kyu (Dept. of New Material Engineering, Chosun University)
Lee, Seokshin (Dept. of Mechanical Engineering, Chosun University)
Kim, Bi-Ryong (Dept. of New Material Engineering, Chosun University)
Park, Tae-Eon (Ecotechkorea Co., LTD, Jeonnam Advanced Ceramics Center)
Yun, Young-Hoon (Dept. of Hydrogen & Fuel Cell Tech., Dongshin University)
Abstract
$Y_2O_3$-BN ceramic composites were fabricated from the slurries of yttria powder with average particle size of 3~10 ${\mu}m$. The slurry was fabricated by mixing PVA binder, NaOH for Ph control, PEG, BN powder and $Y_2O_3$ powder. The mixed $Y_2O_3$ powders were obtained by spray drying process from the slurry. The $Y_2O_3$-BN composite specimen was shaped in size of ${\O}14mm$ and then sintered at $1550^{\circ}C$ and $1600^{\circ}C$, respectively. The characteristics, microstructure, purities, densities, bulk resistance, thermal expansion, hardness and plasma resistance of the $Y_2O_3$-BN composites were investigated with the function of BN contents and sintering temperature.
Keywords
Yttria ($Y_2O_3$); Plasma resistance; Composites; Microstructure;
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