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http://dx.doi.org/10.6111/JKCGCT.2013.23.6.279

A study on the growth of AlN single crystals  

Kang, Seung-Min (Department of Advanced Materials Science and Engineering, Hanseo University)
Abstract
Recently, it has been interested much that AlN (Aluminum Nitride) crystals can be applied to UV LEDs and high power devices as like GaN and SiC crystals. The reports about commercial grade of AlN wafers in the world have been absent, however several results for growth of large size of AlN single crystals have been reported from abroad. In this report, the result of AlN single crystals of a diameter of about 8 mm grown are reported. Optical microscopic characterization was applied to observe the form of the crystals and the crystal quality was evaluated by FWHM measurement by DCXRD rocking curve analysis.
Keywords
AlN; Single crystals; Morphology; PVT (Physical Vapor Transport); Growth facets;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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