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http://dx.doi.org/10.6111/JKCGCT.2013.23.5.224

Optical properties of vanadium dioxide thin films on c-Al2O3 (001) substrates by in-situ RF magnetron sputtering  

Han, Seung Ho (Electronic Materials & Device Research Center, Korea Electronics Technology Institute)
Kang, So Hee (Electronic Materials & Device Research Center, Korea Electronics Technology Institute)
Kim, Hyeongkeun (Electronic Materials & Device Research Center, Korea Electronics Technology Institute)
Yoon, Dae Ho (School of Advanced Materials Science and Engineering, Sungkyunkwan University)
Yang, Woo Seok (Electronic Materials & Device Research Center, Korea Electronics Technology Institute)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.23, no.5, 2013 , pp. 224-229 More about this Journal
Abstract
Vanadium oxide thin films were deposited on $c-Al_2O_3$ (001) substrate by in-situ RF magnetron sputtering. Oxygen partial pressure was adjusted to prepare thermochromic $VO_2$ phase. X-ray diffraction patterns and scanning electron microscopy convincingly showed that plate-like $V_2O_5$ grains were changed into round-shape $VO_2$ grains as oxygen partial pressure decreased. After the optimized deposition conditions were fixed, the effect of substrate temperature and orientation on the optical properties of $VO_2$ thin films was analyzed.
Keywords
$VO_2$; Thermochromic; Optical properties; Crystal structure; Microstructure; Thin Films;
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  • Reference
1 C.G. Granqvist, "Materials science for solar energy conversion systems", (Pergamon Press, Oxford, 1991) Chap. 5.
2 F.J. Morin, "Oxides which show a metal-to-insulator transition at the Neel temperature", Phys. Rev. Lett. 3 (1959) 34.   DOI
3 J.B. Goodenough, "The two compounds of the crystallographic transition in $VO_2$", J. Solid State Chem. 3 (1971) 490.   DOI   ScienceOn
4 D.H. Kim and H.S. Kwok, "Pulsed laser deposition of $VO_2$ thin films", Appl. Phys. Lett. 65 (1994) 3188.   DOI   ScienceOn
5 Y. Muraoka and Z. Hiroi, "Metal-insulator transition of $VO_2$ thin films grown on $TiO_2$ (001) and (110) substrates", Appl. Phys. Lett. 80 (2002) 583.   DOI   ScienceOn
6 K. Okimura, J. Sakai and S. Ramanathan, "In situ x-ray diffraction studies on epitaxial $VO_2$ films grown on c- $Al_2O_3$ during thermally induced insulator-metal transition", J. Appl. Phys. 107 (2010) 063503.   DOI
7 H.-T. Kim, Y.W. Lee, B.-J. Kim, B.-G. Chae, S.J. Yun, K.-Y. Kang, K.-J. Han, K.-J. Yee and Y.-S. Lim, "Monoclinic and correlated metal phase in $VO_2$ as evidence of the Mott transition: coherent phonon analysis", Phys. Rev. Lett. 97 (2006) 266401.   DOI   ScienceOn
8 B.-J. Kim, Y.W. Lee, B.-G. Chae, S.J. Yun, S.-Y. Oh and H.-T. Kim, "Temperature dependence of the first-order metal-insulator transition in $VO_2$ and programmable critical temperature sensor", Appl. Phys. Lett. 90 (2007) 023515.   DOI   ScienceOn
9 U. Qureshi, T.D. Manning and I.P. Parkin, "Atmospheric pressure chemical vapour deposition of $VO_2$ and $VO_2$/$TiO_2$ films from the reaction of $VOCl_3$, $TiCl_4$ and water", J. Mater. Chem. 14 (2004) 1190.   DOI   ScienceOn
10 R. Binions, G. Hyett, C. Piccirillo and I.P. Parkin, "Synthesis and terahertz transmission properties of nanoporous vanadium dioxide films", J. Mater. Chem. 17 (2007) 4652.   DOI   ScienceOn
11 G. Xu, P. Jin, M. Tazawa and K. Yoshimura, "$VO_2$- Sb:$SnO_2$ composite thermochromic smart glass foil", Appl. Surf. Sci. 244 (2005) 449.   DOI   ScienceOn
12 H. Kakiuchida, P. Jin, S. Nakao and M. Tazawa, "Optical properties of vanadium dioxide film during semiconductive- metallic phase transition", Jpn. J. Appl. Phys. 46 (2007) L113.   DOI   ScienceOn
13 Z. Yang and S. Ramanathan, "Direct measurement of compositional complexity-induced electronic inhomogeneity in $VO_2$ thin films grown on gate dielectrics", Appl. Phys. Lett. 98 (2011) 192113.   DOI   ScienceOn
14 C.H. Griffiths and H.K. Eastwood, "Influence on stoichiometry on the metal-semiconductor transition in vanadium dioxide", J. Appl. Phys. 45 (1974) 2201.   DOI   ScienceOn
15 P. Jin, K. Yoshimura and S. Tanemura, "Dependence of microstructure and thermochromism on substrate temperature for sputter-deposited $VO_2$ epitaxial films", J. Vac. Sci. Technol. A. 15 [3] (1997) 1113.   DOI   ScienceOn
16 J. Lappalainen, S. Heinilehto, S. Saukko, V. Lantto and H. Jantunen, "Microstructure dependent switching properties of $VO_2$ thin films", Sens. Actuators A 142 (2008) 250.   DOI   ScienceOn
17 K. Okimura and Y. Suzuki, "Epitaxial growth of $V_2O_3$thin films on c-plane $Al_2O_3$ in reactive sputtering and its transformation to $VO_2$ films by post annealing", Jpn. J. Appl. Phys. 50 (2011) 065803.   DOI
18 P. Singh and D. Kaur, "Influence of film thickness on texture and electrical and optical properties of room temperature deposited nanocrystalline $V_2O_5$ thin films", J. Appl. Phys. 103 (2008) 043507.   DOI   ScienceOn
19 C.W. Zou, X.D. Yan, D.A. Patterson, E.A.C. Emanuelsson, J.M. Bian and W. Gao, "Temperature sensitive crystallization of $V_2O_5$: from amorphous film to ${\beta}$>-$V_2O_5$ nanorods", Cryst. Eng. Comm. 12 (2010) 691.   DOI   ScienceOn
20 N. Fateh, G.A. Fontalvo, L. Cha, T. Klunsner, G. Hlawacek, C. Teichert and C. Mitterer, "Synthesis-structure relations for reactive magnetron sputtered $V_2O_5$ films", Surf. Coat. Technol. 202 (2008) 1551.   DOI   ScienceOn
21 B.D. Cullity, "Elements of X-ray diffraction" (Addison- Wesley, Reading, MA, 1978).
22 Y. Muraoka, Y. Ueda and Z. Hiroi, "Large modification of the metal-insulator transition temperature in strained $VO_2$ films grown on $TiO_2$ substrates", J. Phys. Chem. Solids 63 (2002) 965.   DOI   ScienceOn
23 L.A. Ladd and W. Paul, "Optical and transport properties of high quality crystals of $V_2O_4$ near the metallic transition temperature", Solid State Commun. 7 (1969) 425.   DOI   ScienceOn