Fluorine-based inductively coupled plasma etching of ZnO film |
Park, Jong-Cheon
(Department of Nano Fusion Technology, Pusan National University)
Lee, Byeong-Woo (Department of Marine Equipment Engineering, Korea Maritime University) Kim, Byeong-Ik (Korea Institute of Ceramic Engineering and Technology (KICET)) Cho, Hyun (Department of Nanomechatronics Engineering, Pusan National University) |
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