Browse > Article

Synthesis of PZT thin films made by PZ/PT multi-layered structure  

Kim, S.D. (Department of Electrical and Electronics Engineering, TongMyong University)
Jeon, K.B. (Department of Physics, Dong-A University)
Bae, S.H. (Department of Physics, Dong-A University)
Jin, B.M. (Department of Physics, Dong-Eui University)
Abstract
Four different thin films were made by depositing PZ and PT in different stacking sequences. PZ and PT phases are preferably co-existed in sample A and C that are annealing after each coatings. The sample B and D, on the other hands, have tendency toward the PZT phase after co-firing the sample. The sample B that started from PT stacking first was more stable PZT phase than that of PZ first sample D.
Keywords
null; PZT; multilayered structure; ferroelectric thin film; P-E hystereis;
Citations & Related Records
연도 인용수 순위
  • Reference
1 S.H. Bae, K.B. Jeon and B.M. Jin, "Preferred orientation in $PbZrO_3$ thin film prepared by sol-gel technique", Mater. Res. Bull. 35 (2000) 2245   DOI   ScienceOn
2 Y. Nakao, T. Nakamura, A. Kamisawa, H. Takasu, N. Soyama, T. Atsuki and K. Ogi, "Study on the pb-based ferroelectric thin films prepared by sol-gel method for memory application", Jpn. J. Appl. Phys. 33 (1994) 5265   DOI
3 D.L. Polla, C. Ye, P. Schiller, T. Tamagawa, W.P. Robbins, D. Glumac and C.C. Hsueh, "Applications of PZT and related thin films in piezoelectric microsensors", Mat. Res. Soc. Symp. Proc. 243 (1992) 55
4 A.B. Wegner, S.R.F. Brueck and A.Y. Wu, "Integrated plzt thin film waveguide modulators ferroelectrics", 116 (1991) 195   DOI   ScienceOn
5 M. Sayer, C.V.R. Vasant Kumar, D. Barrow, Li Zou and D.T. Amm, "Integrated piezoelectric and pyroelectric devices from thin ferroelectrics", Mat. Res. Soc. Symp. Proc. 243 (1992) 39
6 S.H. Bae, K.B. Jeon and B.M. Jin, "Dielectric properties of $PbZr_x$$Ti_1$$_xO_3$/$PbZrO_3$multilayered thin film", Mater. Res. Bull. 36 (2001) 1931   DOI   ScienceOn