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Growth of AlN crystals by the sublimation process  

Kang, Seung-Min (Department of Advanced Materials Science and Engineering, Hanseo University)
Abstract
AlN crystals were grown by the sublimation process. As grown AlN crystals were the polycrystalline boule in the form of the agglomerate of small AlN single crystalline AlN. As-grown AlN boule has a length about 2${\sim}$3 mm long and a diameter of 1 inch. The carbon impurities were observed on the surface and inside of the grown AlN crystals and the growth behavior was investigated by optical microscopy and SEM observation.
Keywords
AlN; Growth; Single crystal; Sublimation process; Substrate;
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