[KSCI] Korea Science Citation Index Service

The latest development in the preparation of indium phosphide (InP) poly- crystals and single crystals

Guohao Ren (Shanghai Institute of Ceramics)
Kyoon Choi (Korea Institute of Ceramic Engineering and Technology)
Eui-Seok Choi (Korea Institute of Ceramic Engineering and Technology)
Myung-Hwan Oh (NeosemiTech Corp.)

Publication Information

Journal of the Korean Crystal Growth and Crystal Technology / v.13, no.5, 2003 , pp. 222-229 More about this Journal

Abstract

InP crystal is an increasingly important semiconductor material in the application of long-wave optoelectronic and high frequency devices. The equilibrium vapor pressure of phosphorus at the melting point of InP is so high that the synthesis process is very difficult. Liquid-encapsulated Czochralski (LEC) pulling from the melt at high pressure is a generally favored technique to grow InP single crystals. This technique involves two steps: the synthesis of polycrystalline powder and the growth of single crystal from the melt at high pressure. This article reviewed the latest development in the preparation of InP crystal and the evaluation on the crystal quality.

Keywords

Inp; Liquid-ecapsulated Czochralski (LEC); Synthesis; Evaluation;

Citations & Related Records

Reference

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