Improvement of Optical and Electrical Properties of AZO Thin Films by Controlling Fluorine Concentration
![]() |
Jang, Suyoung
(Department of Materials Science and Engineering, Chonnam National University)
Jang, Jun Sung (Department of Materials Science and Engineering, Chonnam National University) Jo, Eunae (Department of Materials Science and Engineering, Chonnam National University) Karade, Vijay Chandraknt (Department of Materials Science and Engineering, Chonnam National University) Kim, Jihun (School of Integrated Technology, Gwangju Institute of Science and Technology) Moon, Jong-Ha (Department of Materials Science and Engineering, Chonnam National University) Kim, Jin Hyeok (Department of Materials Science and Engineering, Chonnam National University) |
1 | R. A. Afre, N. Sharma, M. Sharon and M. Sharon, Rev. Adv. Mater. Sci., 53, 79 (2018). DOI |
2 | L. Kerkache, A. Layadi and A. Mosser, J. Alloys Compd., 485, 46 (2009). DOI |
3 | F.-H. Wang and C.-L. Chang, Appl. Surf. Sci., 370, 83 (2016). DOI |
4 | T. Minami, Semicond. Sci. Technol., 20, S35 (2005). DOI |
5 | S. Lu, Y. Sun, K. Ren, K. Liu, Z. Wang and S. Qu, Polymers, 10, 5 (2018). DOI |
6 | F. Challali, D. Mendil, T. Touam, T. Chauveau, V. Bockelee, A. G. Sanchez, A. Chelouche and M.-P. Besland, Mater. Sci. Semicond. Process, 118, 105217 (2020). DOI |
7 | K. Ellmer, Nat. Photonics, 6, 809 (2012). DOI |
8 | I. Kim, K.-S. Lee, T. S. Lee, J.-H. Jeong, B.-K. Cheong, Y.-J. Baik and W. M. Kim, J. Appl. Phys., 100, 063701 (2006). DOI |
9 | J. Ma, W. Zhang, J. Lin, Y. Sun, J. Ma, H. Xu, Y. Liu and G. Yang, J. Alloys Compd., 819, 153012 (2020). DOI |
10 | K. D. A. Kumar, S. Valanarasu, A. Kathalingam, V. Ganesh, M. Shkir and S. Faify, Appl. Phys. A: Mater. Sci. Process., 123, 801 (2017). DOI |
11 | M. Purica, E. Budianu, E. Rusu, M. Danila and R. Gavrila, Thin Solid Films, 403-404, 485 (2002). DOI |
12 | Y. R. Ryu and S. Zhu, J. Appl. Phys., 88, 201 (2000). DOI |
13 | M. Krunks and E. Mellikov, Thin Solid Films, 270, 33 (1995). DOI |
14 | K. Ellmer, J. Phys. D: Appl. Phys., 33, R17 (2000). DOI |
15 | Q. Li, L. Zhu, Y. Li, X. Zhang, W. Niu, Y. Guo and Z. Ye, J. Alloys Compd., 697, 156 (2017). DOI |
16 | X. Meng, H. Zhang, X. Zhang, G. Zheng, X. Xie, B. Han, F. Yang, H. Pei and Y. Wang, Optik, 219, 165105 (2020). DOI |
17 | J. G. Lu and S. Fujita, J. Appl. Phys., 101, 083705 (2007). DOI |
18 | J. Tauc, R. Grigorovici and A. Vancu, Phys. Status Solidi, 15, 627 (1966). DOI |
19 | T. T. A. Tuan, D.-H. Kuo, K. Lin and G.-Z. Li, Thin Solid Films, 589, 182 (2015). DOI |
20 | G. Haacke, J. Appl. Phys, 47, 4086 (1976). DOI |
![]() |