Comparative Investigation of Interfacial Characteristics between HfO2/Al2O3 and Al2O3/HfO2 Dielectrics on AlN/p-Ge Structure |
Kim, Hogyoung
(Department of Visual Optics, Seoul National University of Science and Technology (Seoultech))
Yun, Hee Ju (Departmet of Materials Science and Engineering, Seoul National University of Science and Technology (Seoultech)) Choi, Seok (Departmet of Materials Science and Engineering, Seoul National University of Science and Technology (Seoultech)) Choi, Byung Joon (Departmet of Materials Science and Engineering, Seoul National University of Science and Technology (Seoultech)) |
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