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http://dx.doi.org/10.3740/MRSK.2018.28.2.75

Thermodynamic Prediction of TaC CVD Process in TaCl5-C3-H6-H2 System  

Kim, Hyun-Mi (Icheon Branch, Korea Institute of Ceramic Engineering & Technology)
Choi, Kyoon (Icheon Branch, Korea Institute of Ceramic Engineering & Technology)
Shim, Kwang-Bo (Division of Materials Science and Engineering, Hanyang University)
Cho, Nam-Choon (The 4th R&D Institute, Agency for Defense Development)
Park, Jong-Kyoo (The 4th R&D Institute, Agency for Defense Development)
Publication Information
Korean Journal of Materials Research / v.28, no.2, 2018 , pp. 75-81 More about this Journal
Abstract
An ultra-high temperature ceramic, tantalum carbide, has received much attention for its favorable characteristics: a superior melting point and chemical compatibility with carbon and other carbides. One drawback is the high temperature erosion of carbon/carbon (C/C) composites. To address this drawback, we deposited TaC on C/C with silicon carbide as an intermediate layer. Prior to the TaC deposition, the $TaCl_5-C_3H_6-H_2$ system was thermodynamically analyzed with FactSage 6.2 and compared with the $TaCl_5-CH_4-H_2$ system. The results confirmed that the $TaCl_5-C_3H_6-H_2$ system had a more realistic cost and deposition efficiency than $TaCl_5-CH_4-H_2$. A dense and uniform TaC layer was successfully deposited under conditions of Ta/C = 0.5, $1200^{\circ}C$ and 100 torr. This study verified that the thermodynamic analysis is appropriate as a guide and prerequisite for carbide deposition.
Keywords
tantalum carbide; erosion of C/C composite; thermodynamic analysis; chemical vapor deposition;
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Times Cited By KSCI : 3  (Citation Analysis)
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