Thermodynamic Prediction of TaC CVD Process in TaCl5-C3-H6-H2 System |
Kim, Hyun-Mi
(Icheon Branch, Korea Institute of Ceramic Engineering & Technology)
Choi, Kyoon (Icheon Branch, Korea Institute of Ceramic Engineering & Technology) Shim, Kwang-Bo (Division of Materials Science and Engineering, Hanyang University) Cho, Nam-Choon (The 4th R&D Institute, Agency for Defense Development) Park, Jong-Kyoo (The 4th R&D Institute, Agency for Defense Development) |
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