Characteristics of Sapphire Wafers Polishing Depending on Ion Conductivity of Silica Sol
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Na, Ho Seong
(Korea Institute of Ceramic Engineering & Technology(KICET))
Cho, Gyeong Sook (Korea Institute of Ceramic Engineering & Technology(KICET)) Lee, Dong-Hyun (Korea Institute of Ceramic Engineering & Technology(KICET)) Park, Min-Gyeong (Korea Institute of Ceramic Engineering & Technology(KICET)) Kim, Dae Sung (Korea Institute of Ceramic Engineering & Technology(KICET)) Lee, Seung-Ho (Korea Institute of Ceramic Engineering & Technology(KICET)) |
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