Fabrication of Polycrystalline Si Films by Silicide-Enhanced Rapid Thermal Annealing and Their Application to Thin Film Transistors
![]() |
Kim, Jone Soo
(Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology)
Moon, Sun Hong (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) Yang, Yong Ho (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) Kang, Sung Mo (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) Ahn, Byung Tae (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) |
1 | S. W. Lee, S. K. Joo, IEEE Electron Dev. Lett., 17, 160 (1996). DOI ScienceOn |
2 | J. Y. W. Seto, J. Appl. Phys., 46, 5247 (1975). DOI ScienceOn |
3 | G. Baccarani, B. Ricco, and G. Spandini, J. Appl. Phys., 49, 5565 (1978). DOI ScienceOn |
4 | H. Zhang, N. Kusumoto, T. Imushima, and S. Yamazaki, IEEE Electron Device Lett., 13, 297 (1992). DOI |
5 | R. C. Cammarata, C. V. Thompson, C. Hayzelden, and K. N. Tu, J. Mater. Res., 10, 2133 (1990). |
6 | C. Hayzelden and J. L. Batstone, J. Appl. Phys., 73, 8279 (1993). DOI ScienceOn |
7 | J. Jang, J. Y. Oh, S. K. Kim, Y. J. Choi, S. Y. Yoon, C. O. Kim, Nature, 395, 481 (1998). DOI ScienceOn |
8 | S. I. Jun, Y. H. Yang, J. B. Lee, and D. K. Choi, Appl. Phys. lett., 75, 2235 (1999). DOI |
9 | J. H. Eom, K. U. Lee, and B. T. Ahn, Electrochem. Solid State Lett., 8, G65 (2005). DOI ScienceOn |
10 | J. H. Eom, K. U. Lee, B. T. Ahn, J. Electrochem. Soc., 154, H194 (2007). DOI |
11 | J. H. Choi, D. Y. Kim, B. K. Choo, W. S. Sohn, and J. Jang, Electrochem. Solid State Lett., 6, G16 (2003). DOI ScienceOn |
12 | S. M. Kang, K. M. Ahn, B. T. Ahn, J. Electrochem. Soc., 159, H29 (2012). DOI |
13 | K. M. Ahn. S. M. Kang, B. T. Ahn, Curr. Appl. Phys., 12, 1454 (2012). DOI |
14 | Y. H. Yang, K. M. Ahn, S. M. Kang, S. H. Moon, B. T. Ahn, H. S. Kwon, Electron. Mater. Lett., in publication. |
15 | I. Gordon, D. Van Gestel, K. Van Nieuwenhuysen, L. Carnel, G. Beaucarne and J. Poortmans, Thin Solid Films, 487, 113 (2005). DOI |
16 | A. Marmorstein, A. T. Voutsas and R. Solanki. J. Appl. Phys., 82, 4303 (1997). DOI ScienceOn |
17 | J. H. Ahn and B. T. Ahn, J. Electrochem. Soc., 148, H115 (2001). DOI ScienceOn |
18 | J. N. Lee, Y. W. Choi, B. J. Lee, B. T. Ahn, J. Appl. Phys., 82, 2918 (1997). DOI |
19 | Y. H. Yang, K. M. Ahn, B. T. Ahn, Electrochem. Solid State Lett., 13, J92 (2010). DOI |
20 | D. K. Sohn, J. N. Lee, S. W. Kang, B. T. Ahn, Jap. J. Appl. Phys., 35, 1005 (1996). DOI |
![]() |