Effect of Annealing in a Nitrogen Atmosphere on the Properties of In2O3 Films Deposited with RF Magnetron Sputtering
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Kong, Young-Min
(School of Materials Science and Engineering, University of Ulsan)
Lee, Young-Jin (School of Materials Science and Engineering, University of Ulsan) Heo, Sung-Bo (School of Materials Science and Engineering, University of Ulsan) Lee, Hak-Min (School of Materials Science and Engineering, University of Ulsan) Seo, Min-Su (School of Materials Science and Engineering, University of Ulsan) Kim, Yu-Sung (R&D Division, New Optics LTD.) Kim, Dae-Il (School of Materials Science and Engineering, University of Ulsan) |
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