Characterization and Fabrication of Tin Oxide Thin Film by RF Reactive Sputtering |
Kim, Young-Rae
(Microsystem Packaging Center, Seoul Technopark)
Kim, Sun-Phil (School of Mechanical Design and Automation Engineering, Seoul National University of Science and Technology) Kim, Sung-Dong (School of Mechanical Design and Automation Engineering, Seoul National University of Science and Technology) Kim, Sarah Eun-Kyung (Graduate School of NID Fusion Technology, Seoul National University of Science and Technology) |
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