Dry Etching of PMMA and Polycarbonate in a Diffusion Pump-based Capacitively Coupled O2 Plasma
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Park, Ju-Hong
(School of Nano Engineering /Nano Manufacturing Center, Inje University)
Lee, Seong-Hyun (School of Nano Engineering /Nano Manufacturing Center, Inje University) Choi, Jyoung-Hoon (School of Nano Engineering /Nano Manufacturing Center, Inje University) Noh, Ho-Sub (School of Nano Engineering /Nano Manufacturing Center, Inje University) Lee, Je-Won (School of Nano Engineering /Nano Manufacturing Center, Inje University) |
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