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http://dx.doi.org/10.3740/MRSK.2008.18.8.406

Effect of Deposition Parameters on the Properties of Pyrolytic Carbon Deposited by Fluidized-Bed Chemical Vapor Deposition  

Park, Jeong-Nam (Nuclear Material Research Division, Korea Atomic Energy Research Institute)
Kim, Weon-Ju (Nuclear Material Research Division, Korea Atomic Energy Research Institute)
Park, Jong-Hoon (Nuclear Material Research Division, Korea Atomic Energy Research Institute)
Cho, Moon-Sung (Nuclear Hydrogen Reactor Technology Development Division, Korea Atomic Energy Research Institute)
Lee, Chae-Hyun (Department of Materials Engineering, Paichai University)
Park, Ji-Yeon (Nuclear Material Research Division, Korea Atomic Energy Research Institute)
Publication Information
Korean Journal of Materials Research / v.18, no.8, 2008 , pp. 406-410 More about this Journal
Abstract
The properties of pyrolytic carbon (PyC) deposited from $C_2H_2$ and a mixture of $C_2H_2/C_3H_6$ on $ZrO_2$ particles in a fluidized bed reactor were studied by adjusting the deposition temperature, reactant concentration, and the total gas flow rate. The effect of the deposition parameters on the properties of PyC was investigated by analyzing the microstructure and density change. The density could be varied from $1.0\;g/cm^3$ to $2.2\;g/cm^3$ by controlling the deposition parameters. The density decreased and the deposition rate increased as the deposition temperature and reactant concentration increased. The PyC density was largely dependent on the deposition rate irrespective of the type of the reactant gas used.
Keywords
fluidized-bed chemical vapor deposition; pyrolytic carbon; deposition parameter;
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