Characteristics of TiAlN Film on Different Buffer Layer by D.C Magnetron Sputter |
Kim, Myoung-Ho
(Department of Material Science & Engineering, Chonnam National University)
Lee, Doh-Jae (Department of Material Science & Engineering, Chonnam National University) Lee, Kwang-Min (Department of Material Science & Engineering, Chonnam National University) Kim, Woon-Sub (Department of Material Science & Engineering, Chonnam National University) Kim, Min-Ki (Sunkyung Heavy Industrial CO.) Park, Burm-Su (A. G. Optics Co.) Yang, Kook-Hyun (A. G. Optics Co.) |
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