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http://dx.doi.org/10.3740/MRSK.2007.17.7.376

Electrical and optical properties of FTO transparent conducting oxide film by spray pyrolysis and its XPS analysis based on F/Sn ratio  

Song, Chul-Kyu (Nano Materials Team, KICET)
Kim, Chang-Yeoul (Nano Materials Team, KICET)
Huh, Seung-Hun (Nano Materials Team, KICET)
Riut, Doh-Hyung (Nano Materials Team, KICET)
Choa, Yong-Ho (Department of Chemical Engineering, Hanyang University)
Publication Information
Korean Journal of Materials Research / v.17, no.7, 2007 , pp. 376-381 More about this Journal
Abstract
Fluorine-doped tin oxide (FTO) thin film was coated on aluminosilicate glass at $450^{\circ}C$ by spray pyrolysis method. In the range of 0-2.7 molar ratio of F/Sn, the variations of electrical conductivity and visible light transmission were investigated. At the F/Sn ratio of 1.765, the film showed the lowest electrical resistivity value of $3.0{\times}10^{-4}{\Omega}\;cm$, the highest carrier concentration of $2.404{\times}10^{21}/cm^3$, and about $8\;cm^2/V{\cdot}sec$ of electronic mobility. The FTO film showed a preferred orientation of (200) plane parallel to the substrate. X-ray photoelectron spectroscopy analysis results indicated that the contents of $Sn^{4+}-O$ bonding are the highest at 1.765 of F/Sn molar ratio.
Keywords
Fluorine doped tin oxide; Transparent conducting oxide; Spray pyrolysis deposition;
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