[O2/N2] Plasma Etching of Acrylic in a Multi-layers Electrode RIE System
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Kim, Jae-Kwon
(School of Nano Engineering, Center for Nano Manufacturing, Inje University)
Kim, Ju-Hyeong (School of Nano Engineering, Center for Nano Manufacturing, Inje University) Park, Yeon-Hyun (School of Nano Engineering, Center for Nano Manufacturing, Inje University) Joo, Young-Woo (School of Nano Engineering, Center for Nano Manufacturing, Inje University) Baek, In-Kyeu (School of Nano Engineering, Center for Nano Manufacturing, Inje University) Cho, Guan-Sik (School of Nano Engineering, Center for Nano Manufacturing, Inje University) Song, Han-Jung (School of Nano Engineering, Center for Nano Manufacturing, Inje University) Lee, Je-Won (School of Nano Engineering, Center for Nano Manufacturing, Inje University) |
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