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http://dx.doi.org/10.3740/MRSK.2006.16.1.019

Electrical and Optical Characteristics of ZnO:Al Films Prepared by rf Magnetron Sputtering for Thin Film Solar Cells Application  

Jeon, Sang-Won (Solar Cells Research Center, Korea Institute of Energy Research (KIER))
Lee, Jeong-Chul (Solar Cells Research Center, Korea Institute of Energy Research (KIER))
Park, Byung-Ok (Dep. of Inorganic Materials Engineering, Kyungpook National University)
Song, Jin-Soo (Solar Cells Research Center, Korea Institute of Energy Research (KIER))
Yoon, Kyung-Hoon (Solar Cells Research Center, Korea Institute of Energy Research (KIER))
Publication Information
Korean Journal of Materials Research / v.16, no.1, 2006 , pp. 19-24 More about this Journal
Abstract
ZnO:Al(AZO) films prepared by rf magnetron sputtering on glass substrate and textured by post-deposition chemical etching were applied as front contact and back reflectors for ${\mu}c$-Si:H thin film solar cells. For the front transparent electrode contact, AZO films were prepared at various working pressures and substrate temperature and then were chemically etched in diluted HCl(1%). The front AZO films deposited at low working pressure(1 mTorr) and low temperature ($240^{\circ}C$) exhibited uniform and high transmittance ($\geq$80%) and excellent electrical properties. The solar cells were optimized in terms of optical and electrical properties to demonstrate a high short-circuit current.
Keywords
textured AZO; ${\mu}c$-Si:H; solar cell; thin film;
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