Browse > Article
http://dx.doi.org/10.3740/MRSK.2006.16.12.771

Synthesis of AlN Powders from AlOOH  

Lee, Jae-Bum (Department of Materials Science and Engineering, Hanbat National University)
Kim, Seon-Tai (Department of Materials Science and Engineering, Hanbat National University)
Publication Information
Korean Journal of Materials Research / v.16, no.12, 2006 , pp. 771-776 More about this Journal
Abstract
In this study, we report a method to synthesize the aluminum nitride (AlN) powders from aluminum oxyhydroxide (AlOOH). AlOOH powders were prepared from the aluminum hydroxide ($Al(OH)_3$) by heattreatment at the reaction temperature of $350^{\circ}C$. Simple heat treatment of AlOOH in the flow of $NH_3$ gas leads to the formation of hexagonal AlN powders through intermediate conversion of ${\delta}-,\;{\gamma}-$ and ${\alpha}-Al_2O_3$. The FTIR transmission spectra show a broad peak related to Al-N bonds centered around 690 $cm^{-1}$ confirming the presence of AlN. The major peaks in Raman spectra were observed in 250 $cm^{-1}$ and 659 $cm^{-1}$. From the results, synthesized powders from the AlOOH powders were confirmed AlN powders.
Keywords
AlN; AlOOH; $Al(OH)_3$; aluminum nitride; powder;
Citations & Related Records
연도 인용수 순위
  • Reference
1 A. Chang, S, W. Rhee and S. Baik, J. Am. Ceram. Soc., 78, 33 (1995)   DOI   ScienceOn
2 C. N. Lin and S, L. Chung, J. Mater, Res., 16, 2200 (2001)   DOI   ScienceOn
3 S. Hirai, T. Miwa, T. twata, M. Ozawa and H. G. Katayama, J. Jpn Inst. Metals, 53, 1035 (1989)   DOI
4 V. Rosenband and A. Gany, J. Mater. Process. Technol., 147, 197 (2004)   DOI   ScienceOn
5 J. A. Ruffner, P. G. Clem, B. A. Tuttle, D. Dimos and D. M. Gonzles, Thin Solid Fllms, 354, 256 (2000)   DOI   ScienceOn
6 T. Sakai and M. Jwata. Jpn, J. Ceram. Soc., 82, 181 (1974)
7 Y. Kameshima, M. Irie, A. Yasumori and K. Okada, Sol. Stat, Ionics, 172, 185 (2004)   DOI   ScienceOn
8 J. C. Kuang, C. R. Zhang, X. G. Zhou, and S. Q. Wang, J. Cryst. Growth, 263, 12 (2004)   DOI   ScienceOn
9 L. M. Sheppard, Ceram. Bull, 69, 1801 (1990)
10 Y. Baik anld R. A. L. Drew, Key Eng. Mater., 122, 553 (1996)   DOI
11 G Beamson and D. Briggs, Infrared Spectra of Inorganic Compouods, vol. 4, p.110, Academic Press Inc., London, 1997
12 Z. R. Song, Y. H. Yu. S. C. Zou. Z. H. Zheng, D. S, Shen, E. Z. Luo, Z, Xie, and B. Sundaravel, Thin Solid Films, 459. 41 (2004)   DOI   ScienceOn
13 K. Kaya, H. Takahashi, Y. Shibata, Y. Kanno and T. Hirai, Jpn. J. Appl. Phys., 36, 2837 (1997)   DOI
14 A. F. Belyanin, L. L. Bouilov, V. V. Zhirnov, A. I. Kamenev, K. A. Kovalskij and B. V. Spitsyn, Dia. and Rel Mater., 8, 369 (1999)   DOI   ScienceOn
15 C. Carlone, K, M. Lakin, and. H. R. Shanks, J. Appl, Phys., 55, 4010 (1984)   DOI   ScienceOn
16 L. Filippids. H. Siegle, A. Hoffmann, C. Thomsen, K. Karch and F. Bechstedt. Phys. Stat, Sol., B 198, 621 (1996)   DOI   ScienceOn
17 U. Haboeck H. Siegle A. Hoffmann and C. Thomsen, Phys. Stat. Sol., C 6, 1710 (2003)
18 V. Y. Davydov, Y. E. Kitaev, I. N. Goncharuk, A. N. Smirnov, J. Graul, O. Semchinova, D. Uffmann, M. B. Smirnov, A. P. Mirogorodsky and R. A. Evarestov, Phys, Rev, B 58, 12899 (1998)   DOI
19 F. Hasegawa, T. Takahashi, K. Kubo and Y. Nannichi, Jpn. J. Appl. Phys., 26, 1555 (1987)   DOI
20 S. M. Oh and D. W. Park, Thin Solid Films. 316, 189 (1998)   DOI   ScienceOn
21 J. M. Hays, M. Kuball, Y. Shi, and J. H. Edgar, Jpn. J. Appl. Phys., 39, L710 (2000)   DOI   ScienceOn
22 W. Zhang, Y. Someno, M. Sasaki and T. Hirai, Jpn. J. Appl, Phys., 32, L116 (1993)   DOI
23 H. P. Klug and L. E. Alexander, X-ray Diffraction Procedures, New York, p.531 (1974)
24 O. Ambacher, M. S, Brandt, R. Dimitrov, T. Metzger, M. Stutzmann, R. A. Fischer, A. Miehr, A. Bergmaier and G. Dollinger, J. Vac. Sci. Technol., B 14, 3532 (1996)   DOI   ScienceOn
25 A. T. Collins, E .C. Lightowlers and P. J. Dean, Phys. Rev., 158, 833 (1967)   DOI
26 Z. Y. Fan and N. Newman, Mater. Sci and Eng., B 87, 244 (2001)   DOI   ScienceOn