Evaluation of Al CMP Slurry based on Abrasives for Next Generation Metal Line Fabrication |
Cha, Nam-Goo
(Division of Materials and Chemical Engineering, Hanyang University)
Kang, Young-Jae (Division of Materials and Chemical Engineering, Hanyang University) Kim, In-Kwon (Division of Materials and Chemical Engineering, Hanyang University) Kim, Kyu-Chae (Division of Materials and Chemical Engineering, Hanyang University) Park, Jin-Goo (Division of Materials and Chemical Engineering, Hanyang University) |
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