Property and Microstructure Evolution of Nickel Silicides for Poly-silicon Gates
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Jung Youngsoon
(Department of materials science and engineering, University of Seoul)
Song Ohsung (Department of materials science and engineering, University of Seoul) Kim Sangyoeb (Department of materials science and engineering, University of Seoul) Choi Yongyun (Inter-university Semiconductor Research Center, Seoul National University) Kim Chongjun (Inter-university Semiconductor Research Center, Seoul National University) |
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