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http://dx.doi.org/10.3740/MRSK.2004.14.3.196

Effect of a Reciprocating Paddle on the Electrodeposit Uniformity of Patterned Cathodes  

Oh Young-joo (한국과학기술연구원 금속공정연구센터)
Chung Soon-hyo (한국과학기술연구원 금속공정연구센터)
Publication Information
Korean Journal of Materials Research / v.14, no.3, 2004 , pp. 196-202 More about this Journal
Abstract
A numerical simulation based on the finite element method is used to investigate the effect of a reciprocal paddle on the uniformity of deposition rates at a patterned electrode. The calculated deposition rates agreed well with the measured values. The influences of the paddle velocity, the gap between cathodes and paddles, anode size and the distance between the anode and cathode have been studied. The optimum conditions on the paddle and geometric factors for electrodeposit uniformity could be obtained.
Keywords
Finite element method; Electrodeposition; Uniformity of current distribution; Reciprocal paddle;
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