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http://dx.doi.org/10.3740/MRSK.2004.14.3.186

New Fabrication Method of the Electron Beam Microcolumn and Its Performance Evaluation  

Ahn S (선문대학교 자연과학부 신소재과학과/차세대반도체기술연구소)
Kim D. W (선문대학교 자연과학부 신소재과학과/차세대반도체기술연구소)
Kim Y. C (선문대학교 자연과학부 신소재과학과/차세대반도체기술연구소)
Ahn S. J (선문대학교 전자정보통신공학부)
Kim Y. J (선문대학교 공과대학 재료공학부)
Kim H. S (선문대학교 자연과학부 신소재과학과/차세대반도체기술연구소)
Publication Information
Korean Journal of Materials Research / v.14, no.3, 2004 , pp. 186-190 More about this Journal
Abstract
An electron beam microcolumn composed of an electron emitter, micro lenses, scan deflector, and focus lenses have been fabricated and tested in the STEM mode. In this paper, we report a technique of precisely aligning the electron lenses by the laser diffraction patterns instead of the conventional alignment method based on aligner and STM. STEM images of a standard Cu-grid were observed using a fabricated microcolumn under both the retarding and accelerating modes.
Keywords
electron beam microcolumn; laser diffraction pattern; electron optics; laser alignment; electron beam lithography;
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