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http://dx.doi.org/10.3740/MRSK.2004.14.3.163

Oxidation Rates of TiAlLaN Thin Films Deposited by Ion Plating  

Seo Sung Man (공주대학교 신소재공학부)
Lee Kee Sun (공주대학교 신소재공학부)
Lee Kee-Ahn (포항산업과학연구원 부품신소재연구센터 신금속연구팀)
Publication Information
Korean Journal of Materials Research / v.14, no.3, 2004 , pp. 163-167 More about this Journal
Abstract
TiAl(La)N thin films were oxidized in vacuum of about 7 Pa to reduce the oxidation of WC-Co as a substrate. The oxidation rate constants of the thin films were quantified by an assumption of parabolic oxidation. Increasing AI content significantly decreased the parabolic oxidation rate constant. A simultaneous addition of AI and La was more effective to reduce the oxidation rate. The parabolic oxidation rate constant of $Ti_{0.66}$ $Al_{0.32}$ $La_{ 0.02}$N thin film at 1273 K showed about ten times lower than that of TiN. The addition of a small amount of La with Al induced the preferential formation of dense $\alpha$ $-Al_2$$O_3$ film in oxide film, leading to the abrupt reduction of oxidation rate.
Keywords
TiAlN; oxidation; oxide film; oxidation rate; Lanthanum;
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  • Reference
1 Miltan C. Shaw, Metal Cutting Principles, pp. 255, Oxford Univ. Press, (1997)
2 K.-S. Lee, Y.-C. Shin, K.-H. Oh, W.-W. Park and H.-Y Ra, J. Kor. Inst. Met. & Mater., 34(7), 943 (1996)
3 I. Penttinen, J. M. Molarius and R. Lappalainen, J. Vac. Sci. Tech., A 6(3), 2158 (1988)   DOI
4 K.-H. Habig and G. Meier zu Kocker, Surf. Coat. Tech., 62, 428 (1993)   DOI   ScienceOn
5 W. Konig, R. Fritsch and D. Kammermeier, Surf. Coat. Tech., 49, 316 (1991)   DOI   ScienceOn
6 D. Hofmann, B. Hensel, M. Yasuoka and N. Kato, Surf. Coat. Tech., 61, 326 (1993)   DOI   ScienceOn
7 T. Leyendecker, O. Lemmer, S. Esser and J. Ebberink, Surf. Coat. Tech., 48, 175 (1991)   DOI   ScienceOn
8 J.-E. Sundgren, Thin solid films, 128, 21 (1985)   DOI   ScienceOn
9 Milosev, H.-H. Sterehblow, B. Navinsek and M. Metikos-Hukovic, Surf. and Interface Analysis, 23, 529 (1995)   DOI   ScienceOn
10 W.-D. Munz, J. Vac. Sci. Tech., A 4(6), 2721 (1986)
11 O. Knotek, W. Bosch and T. Leyendecker, 11th Int. Plansee Seminar, 1, 667 (1985)
12 E. J. Bienk, H. Reitz and N. J. Mikkelsen, Surf. Coat. Tech., 76/77, 475 (1995)   DOI   ScienceOn
13 D.-Y. Wang, Y.-W. Li and W.-Y. Ho, Surf, Coat. Tech., 114(2), 109 (1999)   DOI   ScienceOn