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http://dx.doi.org/10.3740/MRSK.2004.14.1.009

Silicon Intrinsic Gettering Technology: Understanding and Practice  

Choe Kwang Su (수원대학교 공과대학 전자재료공학과)
Publication Information
Korean Journal of Materials Research / v.14, no.1, 2004 , pp. 9-12 More about this Journal
Abstract
Metallic impurities, such as Fe, Cu, and Au, become generation and recombination centers for minority carriers when combined with oxide precipitates or silicon self-interstitial clusters. As these centers may cause leakage and discharge in silicon devices, their prevention through gettering of the metallic impurities is an important issue. In this article, key aspects of intrinsic gettering, such as oxygen control, wafer cleaning, device area denudation, and bulk oxygen precipitation are discussed, and a practical method of implementing intrinsic gettering is outlined.
Keywords
intrinsic gettering; denuded zone; oxygen precipitation; oxide precipitate; wafer cleaning;
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