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http://dx.doi.org/10.3740/MRSK.2003.13.2.106

Gas Sensing Properties of Nanocrystalline ITO Thick Films with Different Particle Sizes  

Shin, D.W. (Department of Materials Science and Metallurgy, Kyungpook National University)
Lee, S.T. (Department of Materials Science and Metallurgy, Kyungpook National University)
Jun, H.K. (Department of Materials Science and Metallurgy, Kyungpook National University)
Lee, D.D. (School of Electronic and Electrical, Kyungpook National University)
Lim, J.O. (Department of Medical and Biomedical Engineering, Kyungpook National University)
Huh, J.S. (Department of Materials Science and Metallurgy, Kyungpook National University)
Publication Information
Korean Journal of Materials Research / v.13, no.2, 2003 , pp. 106-110 More about this Journal
Abstract
Nano-sized powders of Indium Tin Oxide(ITO) were synthesized by a coprecipitation method. In order to investigate the gas sensing characteristics in the nanocrystalline ITO thick films with various particle sizes, ITO powders with the average particle diameter of 15, 30, and 70 nm respectively were synthesized. And the sensitivity of ITO thick films was measured upon exposure to a target gas($C_2$$H_{5}$ /OH) and some other Volatile Organic Compounds(VOCs), such as, toluene, methanol, benzene, chloroform. As a result, ITO thick films had high sensitivity for ethanol and higher sensitivity with smaller particle size.
Keywords
ITO; sensor; coprecipitation method;
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