Silicon Oxidation in Inductively-Coupled N2O Plasma and its Effect on Polycrystalline-Silicon Thin Film Transistors |
Won, Man-Ho
(Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology)
Kim, Sung-Chul (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) Ahn, Jin-Hyung (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) Kim, Bo-Hyun (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) Ahn, Byung-Tae (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) |
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