Direct Bonding of Si || SiO2/Si3N4 || Si Wafer Pairs With a Furnace |
Lee, Sang-Hyeon
(Dept.of Materials Sciences & Engineering, University of Seoul)
Lee, Sang-Don (Dept.of Materials Sciences & Engineering, University of Seoul) Seo, Tae-Yun (Dept.of Materials Sciences & Engineering, University of Seoul) Song, O-Seong (Dept.of Materials Sciences & Engineering, University of Seoul) |
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