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http://dx.doi.org/10.4283/JKMS.2005.15.1.030

Embedded Ferrite Film Inductor in PCB Substrate  

Bae, Seok (eMD Labs, Central Research Center, Samsung Electro-Mechanics)
Mano, Yasuiko (eMD Labs, Central Research Center, Samsung Electro-Mechanics)
Abstract
Recently, It has been reported that the spin sprayed ferite film shows better magnetic properties at high frequeny that the ferrite by co-firing over $800^{\circ}C$ . Besides, there is no limitation to select the substrate materials because it can be processed with relatively low temperature below $100^{\circ}C$. Therefore, we fabricated film inductor as a passive device for DC-DC converter by a use of spin sprayed embedded form was completed by via hole process of pad opening. Saturation magnetization of 0.61 T and real part of permeability of 110 were obtained in Ni-Zn ferrite. In addition, inductance of 1.52 ${\mu}H$, quality factor of 24.3 at 5 MHz were measured with spiral 16 turn inductor. The rated current of inductor was 863 mA.
Keywords
embedded passive device; inductor; choke filter; ferrite;
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