Design of the Dummy Block for Uniform Stamp Deformation in the UV Nanoimprint Lithography |
Kim, Nam-Woong
(서울대 대학원 기계항공공학부)
Kim, Kug-Weon (순천향대학교 기계공학과) Chung, Tae-Eun (인덕대 정보메카트로닉스과) Sin, Hyo-Chol (서울대 기계항공공학부) |
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