Numerical Investigation of Factors affecting Photoresist Stripping Process on the ITO Surface using the Spray Method
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Kim, Joon Hyun
(Mechanical and Automotive Engineering, Seoul National University of Science & Technology)
Lee, Joon Hyuck (Mechanical and Automotive Engineering, Seoul National University of Science & Technology) Kang, Tae Seong (Mechanical and Automotive Engineering, Seoul National University of Science & Technology) Joo, Gi-Tae (Graduate School of NID Fusing Technology, Seoul National University of Science & Technology) Kim, Young Sung (Graduate School of NID Fusing Technology, Seoul National University of Science & Technology) Jeong, Byung Hyun (Eotech, GERI) Lee, Dae Won (DS Techopia) |
1 | Nguyen, T. H., Lee, M. S., 2014, Extraction and Stripping of Inorganic Acids by Tris 2-ethylhexyl Amine, J. Korean Inst. Met. Ma., 52:10 799-803. DOI |
2 | Song, S. S., Yoon, H. J., Kim, T. H., 2014, Stripper Composition and Cleaning Method, KR Patent: 10-1426088. |
3 | Moore, J. C., 2002, Successful Photoresist Removal: Incorporating Chemistry, Conditions, and Equipment, Proc. SPIE 4690, Advances in Resist Technology and Processing XIX, 892-903. |
4 | Choi, H. H., 2010, Co-teaching Textbook on Display Process: Understanding for the TFT-LCD Manufacturing Process, Korea Display Industry Association, Seoul. |
5 | Kim, J. H., Shim, J. M., Joo, G. T., Kim, Y. S., Jeong, B. H., 2016, An Efficient Photoresist Stripping Process on the ITO Surface Using the Dipping Method, Journal of the Korean Society of Manufacturing Technology Engineers, 25:4 281-289. DOI |
6 | Kim, J. H., Kim, S. H., Jeong, B. H., Joo, G-T., Kim Y. S., 2016, Green Photoresist Stripping Process with the Influence of Free Surface from Dip Withdrawal, Journal of the Korean Society of Manufacturing Technology Engineers, 25:1 14-20. DOI |
7 | Xu, Y., Yuan, J., Repke, J. U., Wozny, G., 2012, CFD Study on Liquid Flow Behavior on Inclined Flat Plate Focusing on Effect of Flow Rate, Engineering Applications of Computational Fluid Mechanics, 6:2 186-194. DOI |
8 |
Korea IT Times, 2010., viewed 9 Nov. 2016, Korean LCD Material Market facing Intensified Competition between Global and Local Companies, |
9 | Li, Z. R., 2015, Organic Light-Emitting Materials and Devices, 2nd Edition, CRC Press, Boca Raton. |
10 |
Kim, K. H., 2014., viewed 9 Nov. 2016, [Display Dynamics] TFT-LCD Chemical Materials Market Remains Robust on Growth of Chinese Panel Makers - Part 1: 4 Key TFT Materials, |
11 | Park, N. H., Kim, D. H., Park, B., Jeong, E., Lee, J. W., 2013, The Industry Trend Analysis and Perspectives of Biodegradable Polymers, Biomaterials Research, 17:3 114-120. |
12 | Ojima, S., Jizaimaru, T., Omae, S., Ohmi, T., 1997, Room Temperature Photoresist Stripper, J. Electrochem. Soc., 144:1 4005-4018. DOI |
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