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http://dx.doi.org/10.7735/ksmte.2016.25.4.281

An Efficient Photoresist Stripping Process on the ITO Surface Using the Dipping Method  

Kim, Joon Hyun (Mechanical and Automotive Engineering, Seoul National University of Science & Technology)
Sim, Jae Myung (Mechanical and Automotive Engineering, Seoul National University of Science & Technology)
Joo, Gi-Tae (Graduate School of NID Fusing Technology, Seoul National University of Science & Technology)
Kim, Young Sung (Graduate School of NID Fusing Technology, Seoul National University of Science & Technology)
Jeong, Byung Hyun (Eotech)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.25, no.4, 2016 , pp. 281-289 More about this Journal
Abstract
Agitation is a secondary process used to increase the PR stripping force on an ITO-glass surface; it is an efficient approach to stripping during production. It activates the stripper to chemically penetrate the PR layer and assists by breaking down the physical bonding forces at the surface. In this study, different stripping tests were conducted by varying the dipping time, the composition, the strip temperature, and the stripper concentration. Optimal PR strip conditions were estimated by using comparative visual inspection of stripped sample surfaces. The stripping process was affected by changes in the moving speeds and the sample positions. It was confirmed that the stripping capability improved at a dilute stripper ratio of 20-40% and a strip temperature of $30-40^{\circ}C$ and within 60 s of strip time.
Keywords
Dip coatings; Dip-agitation; ITO-Glass; Photoresist; Stripping process;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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