Browse > Article
http://dx.doi.org/10.7735/ksmte.2015.24.1.075

Selective Electrodeposition Using Laser Masking and DC Voltage  

Shin, Hong Shik (Department of Energy System Engineering, Korea National University of Transportation)
Kim, Sung Yong (Department of Energy System Engineering, Korea National University of Transportation)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.24, no.1, 2015 , pp. 75-80 More about this Journal
Abstract
This paper proposes a selective electrodeposition process that uses laser masking and a DC voltage. Selective electrodeposition using laser masking and a DC voltage is more efficient than that using laser masking and a pulse voltage. In other words, electrodeposition with a DC voltage allows for precise selective deposition without the limitation of the deposition region. Also, a selective electrodeposition method that uses laser masking and DC voltage can reduce the electrodeposition time. The characteristics of a copper layer deposited by laser masking and DC voltage were examined under various conditions. A selective copper layer with various micro patterns of $2{\mu}m$ thickness was successfully fabricated.
Keywords
Laser masking; Electrodeposition; DC voltage; Copper layer; Micro patterns;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Madou, M. J., 2002, Fundamental of Microfabrication, CRC Press LLC, Boca Raton.
2 Paunovic, M., Schlesinger, M., 2006, Fundamentals of Electrochemical Deposition, John Wiley & Sons, NJ.
3 Schlesinger, M., Paunovic, M., 2010, Modern Electroplating, Wiley, NJ.
4 Paik, B. M., Lee, J. H., Shin, D. S., Lee, K. S., 2012, Development of Three Dimensions Laser Direct Patterning System, KSMTE. 21:1 116-122.
5 Romankiw, L. T., 1997, A path: from Electroplating through Lithographic Masks in Electronics to LIGA in MEMS, Microsyst. Technol., 42:20-22 2985-3005.
6 Wee, L. M., Li, L., 2005, Multiple-layer Laser Direct Writing Metal Deposition in Electrolyte Solution, Appl. Surf. Sci., 247:1-4 285-293.   DOI   ScienceOn
7 Cho, C. H., Shin, H. S., Chu, C. N., 2013, Selective Electrodeposition of Copper on Stainless Steel using Laser Irradiation, Surf. Coat. Technol., 222:5 15-24.   DOI   ScienceOn
8 Shin, H. S., Chung, D. K., Park, M. S., Chu, C. N., 2011, Analysis of Machining Characteristics in Electrochemical Etching using Laser Masking, Appl. Surf. Sci., 258:5 1689-1698.   DOI   ScienceOn