Browse > Article
http://dx.doi.org/10.5394/KINPR.2005.29.10.871

A Study of Fatigue Lifetime Evaluation on the Interconnect of Semiconductor Pressure Sensor According to the Various Materials  

Shim Jae-Joon (Graduate school of Dong-A University)
Han Dong-Seop (Graduate school of Dong-A University)
Han Geun-Jo (Department of Mechanical Engineering, Dong-A University)
Lee Sang-Suk (School of Automotive & machine, Busan Info-Tech College)
Publication Information
Journal of Navigation and Port Research / v.29, no.10, 2005 , pp. 871-876 More about this Journal
Abstract
Application of semiconductor sensors has been widely spreaded into various industries because those have several merits like easy miniaturization and batch production comparison with previous mechanical sensors. But external conditions such as thermal and repetitive load have a bad effect on sensors's lifetime. Especially, this paper was focused on fatigue life of a interconnect made by various materials. Firstly we implemented the stress analysis for interconnect under thermal load and wording pressure. And the fatigue lifetime of each material was induced by Manson & Coffin Equation using the plastic stress-strain curve obtained by the plastic-elastic Finite Element Analysis. The Fatigue lifetime in its bottom is smaller than others and bending load have not an effect on the fatigue lifetime of the interconnect but the stress distribution.
Keywords
Semiconductor pressure sensor; Fatigue lifetime; Thermal load; Interconnect; Sensitivity;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Pelletier, H., Krier, J., Comet, A. and Mille, P.(2000), 'Limits of Using Bilinear Stress-Strain Curve for Finite element Modeling of Nanoindentation Response on Bulk Materials,' Thin Solid Films, Vol. 379, pp.147-155   DOI   ScienceOn
2 Puigcorbe, J., Vila, A. and Morante, J. R. (2003), 'Thermal Fatigue Modeling of Micromachined Gas Sensors,' Sensors and Actuators, B 95, pp. 275-281   DOI   ScienceOn
3 Spaepen, F. (2000), 'Interfaces and Stresses in Thin Films,' Acta Mater., Vol. 48, pp.31-42   DOI   ScienceOn
4 Zienkiewicz, O. C. and Taylor, R. L. (1991), 'The Finite Element Method-Solid and Fluid, Mechanics Dynamics and Non-linearity', McGraw-Hill Co., New York, pp. 1-283
5 Bannantine, J. A, Comer, J. J. and Handrock, J. L. (1990), 'Fundamentals of Metal Fatigue Analysis', Prentice Hall Inc., New Jersey, pp.40-87
6 Huang, M., Suo, Z. and Ma, Q. (2001), 'Metal Film Crawling in Interconnect Structures Caused by Cyclic Temperatures', Acta Mater., Vol. 49, pp.3039-3049   DOI   ScienceOn