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http://dx.doi.org/10.5394/KINPR.2002.26.1.120

Growth and Characterization of ZnS Thin Films by Hot Wall Method  

Lee, Sang-Tae (Korea Maritime University, College of Maritime Science, Division of Ship Operating Systems Engineering)
Abstract
ZnS thin films were prepared on glass substrate at various deposition conditions by a HW apparatus and were systematically investigated the growth characteristics, in terms of deposition edges by a double beam spectro- photometer, and structural analysis by a x-ray diffraction rates were increased with incresing the cell temperature and vapor pressure of sulfur, but were decreased with increasing substrate temperature. The optical characteristics of thin films depends on the deposition rates. The band gap energies of 3.46∼3.52eV measured at room temperature are smaller than the theoretical value of 3.54eV, indicating that impurities exist in the crystal. All ZnS thin films are oriented in the (III) principal direction of a zincblende structure. By introducing the S vapor, optical and crystalline properties have been improved.
Keywords
ZnS; Thin Film; Hot Wall Method; Band GAp Energy; Crystallinity; Cystal Structure;
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1 H. Okuyama, K. Nakano, T. Miyajima, K. Akimoto, 'Epitaxial growth of ZnMgSSe on GaAs substrate by molecular beam epitaxy', JPn. J. Appl. Phys., 30, (1991), pp.L1620-L1623   DOI
2 K. Ohmi, Y. Yamano, S. Lee, T. Ueda, S. Tanaka, H. Kobayashi, 'Growth and characterization of SrS/ZnS multilayered electroluminescent thin films grown by hot wall technique', J. Crystal Growth, 138, (1994), pp. 1061-1065   DOI   ScienceOn
3 C. Frey, D. Serafin, R. Boudreau,'High-brightness rf-sputtered ZnS:Mn films for TFEL displays', SID 88 Digest, (1988), pp.16-18
4 T. Suntola, 'Atomic layer epitaxy', Materials Science Report 4, (1989), pp.261-312
5 A. Lopez-Otero, 'Growth of PbTe films under near-equilibrium condition', J. Appl. Phys., 48, (1977), pp.446-448   DOI
6 D. Schikora, H.Sitter, J. Humenberger, K. Lischka, 'High quality CdTe epilayers on GaAs grown by hot-wall epitaxy', Appl. Phys. Lett., 48, (1986), pp. 1276-1278   DOI
7 허성곤, 'Hot Wall법에 의한 ZnS 박막의 제작과 특성에 관한 연구', 석사학위논문, (2000)
8 日本學術振興會薄膜제31委員會 編 '薄膜ハンいブック', オ-ム社, (1983), p918
9 J.I. Pankove, 'Optical process in semiconductors', Dover Pub., Inc., pp.34-60, 1971
10 The Electhcal Engineering Handbook, Ed.-in-chief R. C. Dorf, CRC Press, Inc., (1993) 2534
11 加藝說軌, 'X線回折分析', 內田老鶴圃, (1990), pp.246-251