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http://dx.doi.org/10.13160/ricns.2014.7.4.221

Fabrication and Characterization of Optically Encoded Porous Silicon Smart Particles  

Sohn, Honglae (Department of Chemistry, Chosun University)
Publication Information
Journal of Integrative Natural Science / v.7, no.4, 2014 , pp. 221-226 More about this Journal
Abstract
Optically encoded porous silicon smart particles were successfully fabricated from the free-standing porous silicon thin films using ultrasono-method. DBR PSi was prepared by an electrochemical etch of heavily doped $p^{{+}{+}}$-type silicon wafer. DBR PSi was prepared by using a periodic pseudo-square wave current. The surface-modified DBR PSi was prepared by either thermal oxidation or thermal hydrosilylation. Free-standing DBR PSi films were generated by lift-off from the silicon wafer substrate using an electropolishing current. Free-standing DBR PSi films were ultrasonicated to create DBR-structured porous smart particles. Optical characteristics of porous smart particles were measured by FT-IR spectroscopy. The surface morphology of porous smart particles was determined by FE-SEM.
Keywords
Porous Silicon; Smart Particle; Bragg Structure; Reflectance;
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Times Cited By KSCI : 12  (Citation Analysis)
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