[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.13160/ricns.2014.7.3.183

Deposition and XPS Study of Pb, Zr, and Ti Films

Choi, Sujin (Department of Chemistry, Pukyong National University)
Park, Juyun (Department of Chemistry, Pukyong National University)
Jeong, Eunkang (Department of Chemistry, Pukyong National University)
Kim, Beob Jun (Busan IL Science High School)
Son, Seo Yoon (Busan IL Science High School)
Lee, Jeong Min (Busan IL Science High School)
Lee, Jin Seong (Busan IL Science High School)
Jo, Hee Jin (Busan IL Science High School)
Park, Jihun (Busan IL Science High School)
Kang, Yong-Cheol (Department of Chemistry, Pukyong National University)

Publication Information

Journal of Integrative Natural Science / v.7, no.3, 2014 , pp. 183-187 More about this Journal

Abstract

Lead zirconate titanate (PZT) is significant material in electrical and optical devices for their ferroelectric, piezoelectric and dielectric properties. In this research, PZT films were fabricated by reactive RF co-sputtering method using Pb, Zr, and Ti targets. From XPS study, lead, zirconium, and titanium are successfully deposited on Si(100) substrate. Thickness of PZT films was measured with a surface profiler and the thickness was decreased as the oxygen gas ratio increased in the sputter gas.

Keywords

XPS; Lead Zirconate Titanate; Sputter; Ferroelectric;

Citations & Related Records

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