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http://dx.doi.org/10.13160/ricns.2011.4.1.001

Chemical and Physical Properties of Porous Silicon  

Jang, Seunghyun (Department of Chemistry, University of Wisconsin)
Publication Information
Journal of Integrative Natural Science / v.4, no.1, 2011 , pp. 1-6 More about this Journal
Abstract
The properties of porous silicon, such as substrate properties, porosity, thickness, refractive index, surface area, and optical properties of porous silicon were reviewed. Some properties, such as porosity, refractive index, thickness, pore diameter, multi-structures, and optical properties, are strongly dependent on the anodization process parameters. These parameters include HF concentration, current density, anodization time, and silicon wafer type and resistivity.
Keywords
Porous Silicon; Optical Property; Refractive Index; Porosity;
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