Browse > Article
http://dx.doi.org/10.13160/ricns.2010.3.4.206

Study on Thickness of Porous Silicon Layer According to the Various Anodization Times  

Jang, Seunghyun (Department of Chemistry, University of Wisconsin)
Publication Information
Journal of Integrative Natural Science / v.3, no.4, 2010 , pp. 206-209 More about this Journal
Abstract
As the etching time is varied, the change of thickness of the porous silicon layers was successfully investigated. The thickness of the PSi layer as a function of anodization time for a p-type substrate that is etched at a constant current density of 50 $mA/cm^2$ in a 35% hydrofluoric acid solution shows a linear relationship between the etching time and the thickness of the PSi layer.
Keywords
Porous Silicon; Anodization; Thickness; Etch.;
Citations & Related Records
연도 인용수 순위
  • Reference
1 D. R. Turner, "Electropolishing Silicon in Hydrofluoric Acid Solutions", J. Electrochem. Soc., Vol. 105, p. 402, 1958.   DOI
2 Y. Arita, K. Kato, and T. Sudo, "Formation and Properties of Porous Silicon Film", IEEE T. Electron Dev., Vol. 24, p. 757, 1977.   DOI
3 T. Unagami and K. Kato, "Study of the Injection Type IPOS Scheme", Jpn. J. Appl. Phys., Vol. 16, p. 1635, 1977.   DOI
4 K. Imai, "A new dielectric isolation method using porous silicon", Solid State Electron, Vol. 24, p. 159, 1981.   DOI   ScienceOn
5 F. Otoi, K. Anzai, H. Kitabayashi, K. Uchiho, and Y. Mizokami, "Metal-Insulator Transition in (TMTTF) 2BF4 under Pressure", J. Electrochem. Soc., Vol. 131, C319, 1984.
6 L. T. Canham, "A periodic index separate confinement heterostructure quantum well laser", Appl. Phys. Lett., Vol. 57, p. 1046, 1990.   DOI
7 A. G. Cullis and L. T. Canham, "Visible light emission due to quantum size effects in highly porous crystalline silicon", Nature, Vol. 353, p. 335, 1991.   DOI
8 Z. Sui, P. P. Leong, I. P. Herman, G. S. Higashi, and H. Temkin, "Raman analysis of light-emitting porous silicon", Appl. Phys. Lett., Vol. 60, p. 2086, 1992.   DOI
9 C. Delerue, G. Allan, and M. Lannoo, "Theoretical aspects of the luminescence of porous silicon", Phys. Rev. B, Vol. 48, p. 11024, 1993.   DOI   ScienceOn
10 F. Koch, V. Petrova-koch, T. Muschik, A. nikolov, and V. Gavrilenko, "Some perspectives on the luminescence mechanism viasurface-confined states of porous Si", Mater. Res. Soc. Symp. Proc., Vol. 298, p. 319, 1993.   DOI
11 E. J. Lee, T. W. Bitner, J. S. Ha, M. J. Shane, and M. J. Sailor, "Light-Induced Reactions of Porous and Single-Crystal Si Surfaces with Carboxylic Acids", J. Am. Chem. Soc., Vol. 118, p. 5375, 1996.   DOI   ScienceOn
12 V. Lehmann and U. Gosele, "Causes and Prevention of Temperature-Dependent Bubbles in Silicon Wafer Bonding", Appl. Phys. Lett., Vol. 58, p. 856, 1991.   DOI
13 M. J. Sailor, J. L. Heinrich, and J. M. Lauerhaas, "Semiconductor Nanoclusters", Stud. surface Sci. Cat. Vol. 103, p. 209, 1996.
14 G. Smestad, M. Kunst, and C. Vial, "Photovoltaic response in electrochemically prepared photoluminescent porous silicon", Sol. Energy Mater. Sol. Cells, Vol. 26, p. 277, 1992.   DOI   ScienceOn
15 A. Uhlir, "Electrolytic shaping of germanium and silicon", Bell Synt. J. Tech., Vol. 35, p. 333, 1956.   DOI
16 J. M. Buriak and M. J. Allen, "Lewis Acid Mediated Functionalization of Porous Silicon with Substituted Alkenes and Alkynes", J. Am. Chem. Soc., Vol. 120, p. 1339, 1998.   DOI   ScienceOn
17 A. Richter, P. steiner, F. Kozlowski, and W. Lang, "Current induced light emission from a porous silicon device", IEEE Electron Device Lett., Vol. 12, p. 691, 1991.
18 K. D. Hirschmann, L. Tsybeskov, S. P. Duttagupta, and P. M. Fauchet, "Silicon-based visible light-emitting devices integrated into microelectronic circuits", Nature, Vol. 384, p. 338, 1996.   DOI   ScienceOn
19 C. Mazzoleni and L. Pavesi, "Controlled photon emission in porous silicon microcavities", Appl. Phys. Lett., Vol. 67, p. 2983, 1995.   DOI   ScienceOn
20 J. M. Lauerhaas and M. J. Sailor, "Chemical Modification of the Photoluminescence Quenching of Porous Silicon", Science, Vol. 261, p. 1567, 1993.   DOI   ScienceOn
21 H. Sohn, S. Letant , M. J. Sailor, and C. Trogler, "Detection of Fluorophosphonate Chemical Warfare Agents by Catalytic Hydrolysis with a Porous Silicon Interferometer", J. Am. Chem. Soc., Vol. 122, p. 5399, 2000.   DOI   ScienceOn
22 S. Letant and M. J. Sailor, "Molecular Identification by Time-Resolved Interferometry in a Porous Silicon Film", Adv. Mater., Vol. 13, p. 355, 2001.   DOI   ScienceOn
23 S. Chan, S. R. Horner, P. M. Fauchet, and B. L. Miller, "Identification of Gram Negative Bacteria Using Nanoscale Silicon Microcavities", J. Am. Chem. Soc., Vol. 123, p. 11797, 2001.   DOI   ScienceOn
24 N. Koshida, T. Nakajima, M. Yoshiyama, K. Ueno, T. Nakagawa, and H. Shinoda, "Ultrasound Emission From Porous Silicon: Efficient Thermo-Acoustic Function as a Depleted Nanocrystalline System", Mater. Res. Soc. Symp. Proc., Vol. 536, p. 105, 1999.
25 H. Sohn, R. M. Calhoun, M. J. Sailor, and W. C. Trogler, "Detection of TNT and Picric Acid on Surfaces and in Seawater by Using Photoluminescent Polysiloles", Angew. Chem. Int. Ed., Vol. 40, p. 2104, 2001.   DOI   ScienceOn
26 H. Sohn, M. J. Sailor, D. magde, and W. C. Trogler, "Detection of Nitroaromatic Explosives Based on Photoluminescent Polymers Containing Metalloles", J. Am. Chem. Soc., Vol. 125, p. 3821, 2003.   DOI   ScienceOn
27 X, Li, J. L. Coffer, Y. D. Chen, R. F. Pinizzotto, J. Newey, and L. T. Canham, "Transition Metal Complex- Doped Hydroxyapatite Layers on Porous Silicon", J. Am. Chem. Soc., Vol. 120, p. 11706, 1998.   DOI   ScienceOn
28 T. E. Bell, P. T. J. Gennissen, D. Demunter, and M. Kuhl, "Porous silicon as a sacrificial material", J. Micromech. Microeng., Vol. 6, p. 361, 1996.   DOI   ScienceOn
29 V. G. Zubko , T. L. Smith, and A. N. Witt, "The size distribution of dust grains in single clouds ? II. The analysis of extinction using inhomogeneous grains", J. Astrophys., p. 501, 1998.
30 V. P. Parkhutik, E. Matveeva, R. Perez, and J. Alamo, "AC conductivity of vacuum deposited phenylene- vinylene oligomers/porous silicon structures", Mater. Sci. Engn. B , Vol. 69, p. 53, 2000.   DOI   ScienceOn
31 V. P. Bondarenko, Y. V. Bogatirev, J. P. Colinge, L. N. Dolgyi, A. M. Dorofeev, and V. A. Yakovtseva, "Humidity Sensor Based on Partially Oxidized Porous Silicon", IEEE. Trans. Nucl. Sci., Vol. 44, p. 1719, 1997.   DOI   ScienceOn
32 V. P. Parkhutik and L. T. Canham, "Porous Silicon as an Educational Vehicle for Introducing Nanotechnology and Interdisciplinary Materials Science", Phys. Stat. Sol., Vol. 182, p. 591, 2000.   DOI   ScienceOn