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Preparation and Properties of Water-Soluble Photosensitive Polymer with Azido Group  

Yoon, Keun-Byoung (Department of Polymer Science, Kyungpook National University)
Lee, Joon-Tae (Material Testing Team, Korea Testing Laboratory)
Han, Jeong-Yeop (LG Siltron)
Lee, Dong-Ho (Department of Polymer Science, Kyungpook National University)
Publication Information
Polymer(Korea) / v.31, no.5, 2007 , pp. 374-378 More about this Journal
Abstract
Water-soluble terpolymer of acrylamide, diacetone acrylamide, and acrylic acid was prepared by redox initiators in aqueous medium. One component photoresist was synthesized by reaction of terpolymer with 4-azidoaniline. By blending the aqueous acrylamide/diacetone acrylamide copolymer solution with bisazide, 4,4'-diazidostilbene -2,2'-disulfuric acid sodium salt, two component photoresist was prepared. The photosensitivity per azido group unit mole of one component photoresist was 4 times higher than that of two component photoresist. The dot-type pattern was successfully achieved with one component photoresist at low exposure energy, which is prospective to be used as black matrix negative photoresist.
Keywords
negative photoresist; azido group; photosensitivity; black matrix;
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