Browse > Article
http://dx.doi.org/10.5757/ASCT.2017.26.6.195

Development of a Plasma Training Lab kart: System Setup and Numerical Simulation  

Joo, Junghoon (Department of Materials Science and Engineering, Kunsan National University)
Publication Information
Applied Science and Convergence Technology / v.26, no.6, 2017 , pp. 195-200 More about this Journal
Abstract
A mobile lab kart for plasma training is developed with a high vacuum pumping system, vacuum gauges and a glass discharge tube powered by a high voltage transformer connected to a household 60 Hz line. A numerical model is developed by using a commercial multiphysics software package, CFD-ACE+ to analyze the experimental data. Simulations for argon and nitrogen were carried out to provide fundamental discharge characteristics. Variations of the kart configuration were demonstrated: a glass tube with three electric probes, optical emission spectrometer attachment and infra red thermal imaging system to give more detailed analysis of the discharge characteristics.
Keywords
Plasma; Geissler tube; CCP; Numerical simulation;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 Y. Yoo and J. Joo, J. Kor. Inst. Surf. Eng., Vol. 46, No. 4 (2013) 168.   DOI
2 J. Joo, Kor. Inst. Surf. Eng., Vol. 46, No. 3 (2013) 133.   DOI
3 J. Joo, Kor. Inst. Surf. Eng., Vol. 45, No. 2 (2012) 53.   DOI
4 S. Lee, J. Kor. Vac. Soc., Vol. 18, No. 3 (2009) 176.   DOI
5 D. Kwon and N. Yoon, Appl. Sci. Conv. Technol., Vol. 24, No. 6 (2015) 237.   DOI
6 H. Kim, W. Yang and J. Joo, J. Appl. Phys. Vol. 118, (2015) 043304-1.   DOI
7 J. Joo, Thin Solid Films, Vol. 519 (2011) 6892.   DOI
8 S. Son, K. Yi and J. Joo, J. Mahrholz, and K. Rie, J. Cry. Growth, Vol. 310 (2008) 1697.   DOI
9 J. Joo and S. Rossnagel, J. Kor. Phys. Soc., Vol. 54 (2009) 1048.   DOI
10 J. Joo, Appl. Sci. Conv. Technol., Vol. 24, No. 4 (2015) 102.   DOI
11 J. Coburn and M. Chen, J. Appl. Phys, Vol. 51 (1980) 3134.   DOI
12 J. Joo, Appl. Sci. Conv. Technol., Vol. 23, No. 3 (2014) 139.   DOI