[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.5757/ASCT.2017.26.5.114

Effects of the Capacitive Field in an Inductively Coupled Plasma Discharge

Choe, HeeHwan (School of Electronics and Information Engineering, Korea Aerospace University)

Publication Information

Applied Science and Convergence Technology / v.26, no.5, 2017 , pp. 114-117 More about this Journal

Abstract

Plasma characteristics of two-dimensional inductively coupled discharge simulation is investigated. Impedance of an inductively coupled plasma discharge was considered. Voltage drops across antenna coils and current variation between coils made different profiles of plasma characteristics. Importance of the capacitive field effect in some case was analyzed.

Keywords

ICP; Simulation; Capacitive field; Coil voltage; Coil current;

Citations & Related Records

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