[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.5757/ASCT.2015.24.6.237

A Three-Dimensional Calculation of the Reactor Impedance for Planar-Type Cylindrical Inductively Coupled Plasma Sources

Kwon, Deuk-Chul (Plasma Technology Research Center, National Fusion Research Institute)
Yoon, Nam-Sik (Department of Electrical Engineering, Chungbuk National University)

Publication Information

Applied Science and Convergence Technology / v.24, no.6, 2015 , pp. 237-241 More about this Journal

Abstract

The reactor impedance is calculated for a planar-type cylindrical inductively coupled plasma source by expanding the electromagnetic fields into their Fourier-Bessel series forms including the three-dimensional shape of the antenna. The mode excitation method is utilized to determine the electromagnetic fields based on a Poynting theorem-like relationship. From the obtained electromagnetic fields, a tractable form of the reactor impedance is obtained as a function of various plasma and geometrical parameters and applied to carry out a parametric study.

Keywords

Electromagnetic fields; ICP; Reactor impedance;

Citations & Related Records

Times Cited By KSCI : 1 (Citation Analysis)

Reference
Cited By KSCI

1	N. S. Yoon, S. S. Kim, C. S. Chang, and D I Choi, J. Korean Phys. Soc. 28, 172 (1995).
2	N. S. Yoon, S. S. Kim, C. S. Chang, and D I Choi, Phys. Rev. E 54, 757 (1996). DOI
3	S. S. Kim, C. S. Chang, and N. S. Yoon, J. Korean Phys. Soc. 29, 678 (1996).
4	N. S. Yoon, J. H. Han, and S. M. Hwang, J. Korean Phys. Soc 32, s196 (1997).
5	N. S. Yoon, S. M. Hwang, and D. I. Choi, Phys. Rev. E 55, 7536 (1997). DOI
6	N. S. Yoon, K. I. You, and S. M. Hwang, Surf. Coat. Technol. 112, 34 (1999). DOI
7	K. I. You and N. S. Yoon, Phys. Rev. E 59, 7074 (1999). DOI
8	D. C. Kwon, W. S. Chang, M. Park, D. H. You, M. Y. Song, S. J. You, Y. H. Im, and J.-S. Yoon, J. Appl. Phys. 109, 073311 (2011). DOI
9	D. C. Kwon, M. Y. Song, and J. S. Yoon, J. Phys. D: Appl. Phys. 46, 025202 (2013). DOI
10	D. C. Kwon, M. Y. Song, J.-S. Yoon, and N. S. Yoon, Comput. Phys. Commun. 184, 2251 (2013). DOI
11	E. F. Jaeger, L. A. Berry, J. S. Tolliver, and D. B. Batchelor, Phys. Plasma 2, 2597 (1995). DOI
12	D. C. Kwon, N. S. Yoon, J. H. Kim, Y. H. Shin, and K. H. Chung, J. Korean Phys. Soc. 50, 40 (2007). DOI
13	B. S. Jung and N. S. Yoon, J. Korean Phys. Soc. 55, 1860 (2009). DOI
14	J. D. Jackson, Classical Electrodynamics (Wiley, New York, 1999), p. 352.