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http://dx.doi.org/10.5757/ASCT.2015.24.5.178

Vanadium Oxide Microbolometer Using ZnO Sandwich Layer  

Han, Myung-Soo (Medical Photonics Research Center, Korea Photonics Technology Institute)
Kim, Dae Hyeon (Medical Photonics Research Center, Korea Photonics Technology Institute)
Ko, Hang Ju (Medical Photonics Research Center, Korea Photonics Technology Institute)
Kim, Heetae (Rare Isotope Science Project, Institute for Basic Science)
Publication Information
Applied Science and Convergence Technology / v.24, no.5, 2015 , pp. 178-183 More about this Journal
Abstract
Optical, electrical and structural properties of VOx/ZnO/VOx thin film are studied. The VOx/ZnO/VOx multilayer is deposited by using a radio frequency (RF) sputtering system. The VOx/ZnO/VOx thin film shows the high temperature coefficient of resistance (TCR) of $-3.12%/^{\circ}C$ and the low sheet resistance of about 80 $k{\Omega}/sq$ at room temperature. The responsivity and detectivity of the bolometer are measured as a function of modulation frequency.
Keywords
IR detector; Microbolometer; Oxygen annealing; TCR;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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