Reduction of Contact Resistance Between Ni-InGaAs Alloy and In0.53Ga0.47As Using Te Interlayer |
Li, Meng
(Department of Electronics Engineering, Chungnam National University)
Shin, Geon-Ho (Department of Electronics Engineering, Chungnam National University) Lee, Hi-Deok (Department of Electronics Engineering, Chungnam National University) Jun, Dong-Hwan (Technology Development Division, Korea Advanced Nano Fab Center) Oh, Jungwoo (School of Integrated Technology, Yonsei Institute of Convergence Technology, Yonsei University) |
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