[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4313/TEEM.2017.18.1.16

RF-MEMS-Based DPDT Switch on Silicon Substrate for Ku-Band Space-Borne Applications

Singh, Harsimran (Department of Electronics & Communication Engineering, Guru Nanak Dev University-Regional Campus)
Malhotra, Jyoteesh (Department of Electronics & Communication Engineering, Guru Nanak Dev University-Regional Campus)

Publication Information

Transactions on Electrical and Electronic Materials / v.18, no.1, 2017 , pp. 16-20 More about this Journal

Abstract

A RF-MEMS (radio-frequency microelectromechanical-system) based DPDT (double pole double throw) switch for the Ku band has been designed and analyzed for this article. The switch topology is based on the FG-CPW (finite ground-coplanar waveguide) configuration of a microstrip-transmission line. An FEM-based multiphysics solver is used for the evaluation of the spring constant, stress distribution, and pull-in voltage regarding the requirements of the switch-beam unit. The electromagnetic performance of the switch is investigated for a $675{\mu}m$ thick silicon substrate. For the operational frequency of 14.5 GHz, an insertion loss better than -0.3 dB, a return loss better than -40 dB, and input/output- and output-port isolations better than -35 dB are achieved for the switching unit.

Keywords

RF-MEMS; Spring constant; Stress; Pull-in voltage; Finite ground;

Citations & Related Records

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